| 摘要 |
PURPOSE: An apparatus for recovering sulfur hexafluoride is provided to miniaturize the device for recovering the sulfur hexafluoride(SF_6) from mixed gas through simple membrane separation and to obtain the sulfur hexafluoride of high purity. CONSTITUTION: An apparatus for recovering sulfur hexafluoride comprises; a pulverized body removal part(20) which removes the pulverized body by passing mixed gas of the sulfur hexafluoride through a filer layer; an acidic gas removal part(30) which introduces the mixed gas of the sulfur hexafluoride into a packed layer of calcium carbonate(CaCO_3), NaF_2, calcium hydroxide(Ca(OH)_2), and calcium chloride(CaCl_2); a moisture removal part(40) passing the mixed gas through zeolite or an activated carbon layer; a membrane separation part(50) separating the mixed gas into nitrogen(N_2), oxygen(O_2), and concentrated sulfur hexafluoride by passing the mixed gas through a membrane separator; a gas-liquid separating tank(60) separating gas and liquid using the difference of condensing temperatures by compressing the sulfur hexafluoride gas into liquid; and a sulfur hexafluoride reservoir(70). It includes. |
