| 摘要 |
PURPOSE: An apparatus and a method for inspecting a circuit pattern are provided to detect a short circuit position on a conductive pattern by applying an inspection signal of one frequency with opposite wavelength to two conductive patterns which are shorted. CONSTITUTION: An inspection signal applying unit applies a first inspection signal and a second inspection signal to two adjacent conductive patterns formed on a substrate. A sensor moving unit(6) moves a sensing unit along an extended installation direction of a conductive pattern. A detector(5) outputs a detection signal by adding the reverse signals of the first and second inspection signals. A determining unit(16) determines the position of the conductive pattern below a preset threshold value by the reduction of the detection signal as the short failure position. |
