MONITORING APPARATUS, MONITORING METHOD, INSPECTING APPARATUS AND INSPECTING METHOD

摘要

An inspecting apparatus is provided with an imaging section for imaging a first range and a second range, which is shifted from the first range in a prescribed direction, in an object to be inspected; a differential processing section for obtaining a differential between signals of sections which correspond to the prescribed direction in the image of the first range and that of the second range; and an inspecting section for inspecting existence of a defect in the object, based on the processing results obtained from the differential processing section.