发明名称 CATHODE SUPPORTING STRUCTURE IN PIERCE ELECTRON GUN
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a cathode support structure in which a disc-shaped cathode of a pierce electron gun is supported on an outer circumferential ring larger in diameter than the cathode via three or more support rods, which prevents support rod buckling caused by the thermal expansion of the cathode and the support rods and effectively suppresses heat release from the cathode. <P>SOLUTION: In the cathode support structure, each of the support rods 22 is arranged between the cathode 2 and the outer circumferential ring 21 so that the axis of the support rod 22 is inclined toward one direction of the circumference of the cathode 2 relative to a straight line L that links the intersection of the axis of the support rod 22 and the inner circumferential surface of the circumferential ring 21 to the center of the cathode 2, andδis identical in each support rod 22 assuming a distance between two straight lines is eccentricityδwhen projecting a straight line matching the axis of the support rod 22 and a straight line being parallel with the straight line to passing through the center of the cathode 2 onto a plane perpendicular to the axis of the cathode 2. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010135105(A) 申请公布日期 2010.06.17
申请号 JP20080307562 申请日期 2008.12.02
申请人 ULVAC JAPAN LTD 发明人 KUSUMOTO TOSHIO;WATANABE MASAYA;IWATA KENICHI;CHIN KOKUKA;SATAKE TORU
分类号 H01J1/28;C23C14/30;H01J37/065;H01J37/07 主分类号 H01J1/28
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