发明名称 |
ELIMINATION OF CROSS TALK IN BACK SCATTER INSPECTOR COMPRISING A PLURALITY OF SOURCES BY MAKING EMISSION OF RADIAL RAY SURE ONLY BY ONE SUPPLY SOURCE PER TIME |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and method for inspecting an object using permeable radial rays. Ž<P>SOLUTION: The system and the method for inspecting the object use a plurality of sources of permeable radial rays. The irradiation of the inspected object by the source is temporally sequenced so that the source of the detected scattered radial ray is unambiguous. Thus, a plurality of views of the inspected objects can be obtained and image quality can be enhanced even in compact geometry in which beams are substantially co-planar. The inspection system has a first source for providing a first beam of the permeable radial ray of a specified cross section directed in a first beam direction substantially transverse to the direction of the motion of the object. The inspection system also has a second source for providing a second beam of the permeable radial ray in a second beam direction, and the inspection system may have additional sources of additional beams. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2010133977(A) |
申请公布日期 |
2010.06.17 |
申请号 |
JP20100040967 |
申请日期 |
2010.02.25 |
申请人 |
AMERICAN SCIENCE & ENGINEERING INC |
发明人 |
CASON RANDY |
分类号 |
G01N23/203;G01N23/04;G01N23/20;G01V5/00;G21K5/04 |
主分类号 |
G01N23/203 |
代理机构 |
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