发明名称 INTERFEROMETER ACTUATOR
摘要 The invention relates the movement of at least one movable means of an interferometer relative to the body of the interferometer. The system according to the invention, comprises at least two interferometer actuators, that can be operated individually, so that the at least two actuators are capable of moving the at least one movable means of the interferometer. When activating at least one of the at least two interferometer actuators the at least one movable means of the interferometer is moved with a minimum need for correcting for e.g. tilt. In a preferred configuration the system and the method according to the invention comprises three interferometer actuators that can be operated individually.
申请公布号 US2010149542(A1) 申请公布日期 2010.06.17
申请号 US20080596206 申请日期 2008.04.21
申请人 CHEMOMETEC A/S 发明人 ARNVIDARSON BOERKUR
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
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