发明名称 EVAPORATOR FOR ORGANIC MATERIALS
摘要 An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapour channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface.
申请公布号 WO2010035130(A3) 申请公布日期 2010.06.17
申请号 WO2009IB06990 申请日期 2009.09.29
申请人 APPLIED MATERIALS, INC.;HEIN, STEFAN;HOFFMANN, GERD 发明人 HEIN, STEFAN;HOFFMANN, GERD
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址