| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample analyzer capable of evaluating local uniformity of a sample surface or an interface, by converting simply an X-ray intensity distribution into an actual image. SOLUTION: A sample 2 which is a measuring object and an X-ray reflecting mirror 3 are irradiated with an interfering X-ray, and a control part 7 controls an incident angle or an incident position to the X-ray of the sample 2 or the X-ray reflecting mirror 3 so that a first reflected X-ray from the sample and a second reflected X-ray from the X-ray reflecting mirror 3 are overlapped together. Then, the X-ray intensity distribution by interference between the overlapped first reflected X-ray and second reflected X-ray is detected by a detection part 8, and an operation processing part 9 converts the X-ray intensity distribution into actual space data. COPYRIGHT: (C)2010,JPO&INPIT |
