The invention relates to a method for imaging a microfabricated device comprising at least one oscillating component. The method comprises stroboscopically illuminating in an interferometric setup said component in synchronized relationship with the excitation of the device, and detecting interference light in synchronized relationship with the illumination and excitation. According to the invention the component is illuminated at a wavelength band which is at least partly transmissible by the component, and the positions of at least two separate surfaces of the component of interest are determined based on the interference light detected at least at two temporal phases of excitation of the device. The invention provides an efficient method for in-depth characterization of micromechanical structures that provide only one-sided access during operation.
申请公布号
WO2010066949(A1)
申请公布日期
2010.06.17
申请号
WO2009FI50993
申请日期
2009.12.09
申请人
HELSINGIN, YLIOPISTO;KASSAMAKOV, IVAN;AALTONEN, JUHA;SAARIKKO, HEIMO;HAEGGSTROEM, EDWARD;HANHIJAERVI, KALLE
发明人
KASSAMAKOV, IVAN;AALTONEN, JUHA;SAARIKKO, HEIMO;HAEGGSTROEM, EDWARD;HANHIJAERVI, KALLE