VERFAHREN ZUR HERSTELLUNG EINES QUARTZ-SENSORSYSTEMS
摘要
A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.
申请公布号
DE602005021088(D1)
申请公布日期
2010.06.17
申请号
DE20056021088T
申请日期
2005.04.19
申请人
HONEYWELL INTERNATIONAL INC.
发明人
COOK, JAMES D.;MARSH, BRIAN J.;LIU, JAMES Z.;SPELDRICH, BRIAN D.;PAVELESCU, IOAN;BUICULESCU, VLAD;COBIANU, CORNEL P.