| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate with a thin-film piezoelectric material for improving the flatness of a thin-film piezoelectric material surface such as lithium potassium sodium niobate, a thin-film piezoelectric element, a thin-film piezoelectric device, and a method of manufacturing the substrate with a thin-film piezoelectric material. <P>SOLUTION: The substrate with a thin-film piezoelectric material includes a substrate 1, an oxide film formed on the substrate 1, a lower electrode layer 2 formed on the oxide film, and a perovskite type piezoelectric layer 3 formed on the lower electrode layer 2. The piezoelectric layer 3 is composed of (Na<SB>x</SB>K<SB>y</SB>Li<SB>z</SB>)NbO<SB>3</SB>(0≤x≤1, 0≤y≤1, 0≤z≤0.2, x+y+z=1). The lower electrode layer 2 is oriented to a predetermined direction, and the piezoelectric layer 3 is oriented to a predetermined direction against the lower electrode layer 2. <P>COPYRIGHT: (C)2010,JPO&INPIT |
