| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric power generator which is extremely small and efficiently generates electricity from external vibrations of a low frequency, and to provide a manufacturing method for the piezoelectric power generator. <P>SOLUTION: The piezoelectric power generator 100 includes a substrate 2, an insulating layer 3 formed on the substrate 2, a base 1 having a semiconductor layer 4 formed on the insulating layer 3, a support portion 40 including a part of the semiconductor layer 4, a vibrating portion 10 which includes a part of semiconductor layer 4, has one end fixed to the support portion 40 and the other end serving as a free end 10a and vibrates in response to externally applied mechanical vibrations, a piezoelectric conversion portion 20 which is formed on the vibrating portion 10 and develops a distortion as a result of the bending motion of the vibrating portion 10 to generate electric energy out of mechanical vibration energy, and a dot-shaped weight 50 which is disposed near the free end 10a of the vibrating portion 10 to prompt the vibrating portion 10 to vibrate. <P>COPYRIGHT: (C)2010,JPO&INPIT |
