| 摘要 |
An aim of the invention is to provide cleaning sheets, a transfer member having a cleaning function, and a cleaning method for substrate-processing apparatus which should be kept away from particles, such as, e.g., apparatus for producing or inspecting semiconductors, flat panel displays, printed wiring boards, or the like. <??>The invention provides: a cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer. |
