| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum suction pad preventing damage and contamination of an object to be processed, and achieving an increasingly lower dusting characteristic; and to provide a vacuum suction apparatus. SOLUTION: A vacuum suction pad 2 is formed of porous carbon, wherein the vacuum suction pad 2 holds the object to be processed W by suction at its front surface, and communicates with a vacuum source at its rear surface. The front surface of the vacuum suction pad 2 is coated with a fluorine-contained resin, and the object to be processed is sucked to the vacuum suction pad via the coat F' of the fluorine-contained resin. Further, the fluorine-contained resin is a conductive one so as to eliminate the possibility of the vacuum suction pad losing conductivity that a carbon material originally has. COPYRIGHT: (C)2010,JPO&INPIT |
