| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method which can determine with improved accuracy initial phase contrast property of a pair of sensors 6a, 6b held at and fixed to a covering 5, and which can confirm with a single measurement operation, when determination results are obtained wherein the initial phase contrast property is not desirable, whether the results are caused by a deviation in positional relationship between each of the sensors 6a, 6b in a circumferential direction. SOLUTION: As an encoder for inspection 10b, one equipped with a first property variation region 15 having a property border in a "<" figure shape and a second property variation region 16 having a property border parallel to an axial direction is used. An initial phase contrast property is determined based on phase contrast between output signals of each of the sensors 6a, 6b in the first property variation region when the encoder for inspection 10b is rotated at a uniform speed. The deviation of positional relationship is determined based on phase contrast in the second property variation region. The problem is solved by adopting foregoing method. COPYRIGHT: (C)2010,JPO&INPIT
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