| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an illuminator capable of emitting a stable quantity of illumination light without changing the transmission wavelength of an interference filter, and a surface inspecting apparatus equipped with the illuminator. Ž<P>SOLUTION: The illuminator 50 is equipped with a dichroic mirror 53 which divides the light emitted from a light source 51 into illumination light having a specific wavelength and non-illumination light other than the illumination light, the interference filter extracting the illumination light having the specific wavelength from the divided illumination light, first and second filter devices 56 and 57 capable of moving the interference filter to a wafer illuminating light path Op1 and a filter heating light path Op2, and a control part performing control for moving the interference filter to the filter heating light path Op2 by the first and second filter devices 56 and 57 to irradiate the interference filter with the non-illumination light to heat the same and subsequently moving the interference filter to the wafer illuminating light path Op1 by the first and second filter devices 56 and 57 and irradiating the interference filter with the illumination light to extract the illumination light to thereby emit the same. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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