发明名称 |
FLEXIBLE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A method of manufacturing a flexible substrate is provided. The method includes coating a precursor including an inorganic polymer on the flexible substrate, curing the precursor including the inorganic polymer, and oxidizing a surface of the cured precursor including the inorganic polymer to form an oxide layer. Accordingly, an organic/inorganic barrier layer may be formed by only one coating process of a thin film. In this case, oxygen plasma or infrared ray/ozone processing may be performed at atmospheric pressure, thereby reducing process costs and equipment costs by not using vacuum equipment.
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申请公布号 |
US2010151274(A1) |
申请公布日期 |
2010.06.17 |
申请号 |
US20090633937 |
申请日期 |
2009.12.09 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
KANG SEUNG YOUL;KIM GI HEON;KIM YONG HAE;YOON SUNG MIN;KIM CHUL AM |
分类号 |
B32B9/04;B05D3/04;B05D3/06;B05D5/12 |
主分类号 |
B32B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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