IMAGE SENSOR COMPRISING A MICROLENS ARRAY, AND MANUFACTURING METHOD THEREOF

摘要

The present invention relates to an image sensor comprising a microlens array, and to a manufacturing method thereof. The method of the present invention gradually increases the aluminum composition ratio of a compound semiconductor as the latter gradually gets farther from a substrate, to enable a microlens-forming layer to grow, and makes the oxidation speed of the region adjacent to the substrate slower and the oxidation speed of the region farther from the substrate faster, making the interface between the oxidized region and the unoxidized region into a lens shape after the completion of oxidation. The thus-made lens is integrated into an image sensor. The present invention reduces costs for manufacturing image sensors in which a microlens is integrated, increases the signal-to-noise ratio and resolution of the image sensor, and achieves improved sensitivity.