发明名称 MICROWAVE PLASMA TREATMENT DEVICE
摘要 <p>Disclosed is a microwave plasma treatment device that is equipped with a waveguide (30a), in which microwaves are propagated, and two or more processing chambers (44), in which a prescribed treatment is performed using microwaves. Each treatment chamber (44) possesses an inlet port (46) through which microwaves are introduced from the waveguide (30a), and at least two of which inlet ports (46) are formed in the end (47) of the waveguide (30a).</p>
申请公布号 WO2010067590(A1) 申请公布日期 2010.06.17
申请号 WO2009JP06714 申请日期 2009.12.09
申请人 TOYO SEIKAN KAISHA, LTD.;YAMADA, KOUJI;AOYA, MASAKI;SHINODA, HIROKI;KUNIHIRO, ICHIRO 发明人 YAMADA, KOUJI;AOYA, MASAKI;SHINODA, HIROKI;KUNIHIRO, ICHIRO
分类号 C23C16/511;B65D23/02;H05H1/46 主分类号 C23C16/511
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