| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable low-temperature cooling of cooled objects for a short time uniformly by a simplified configuration and improve cooling quality. Ž<P>SOLUTION: A composite cooling device includes: a vacuum cooling means 4 for performing vacuum cooling of the cooled objects 8 within a cooling chamber 2; a cold air cooling means 5 for performing cold air cooling of the cooled objects 8; and a controller 37 for controlling the vacuum cooling means 4 and cold air cooling means 5. The vacuum cooling means 4 comprises a decompression means 35, and cold water is supplied from a cold water manufacturing device 17 to the decompression means 35 and a cooling heat exchanger 14. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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