TRANSMISSION ELECTRON MICROSCOPE HAVING ELECTRON SPECTROMETER
摘要
<p>A spectral image formed by an axis of the energy loss amount and an axis of the position information which axes orthogonally intersect each other is processed by an electron spectrometer and a transmission electron microscope as follows. An electron beam position is calculated from a two-dimensional electron beam position image formed by the aforementioned two axes. The electron beam position is compared to a reference electron beam position. A distortion amount is calculated according to a different point between the respective electron beam positions. Thus, a distortion of the spectral image of a sample to be analyzed can be corrected with a high efficiency and a high accuracy. Provided are a method and a device for efficiently and accurately correcting a distortion of a spectral image formed by the axis of the energy loss amount and the axis of the position information which axes orthogonally intersect each other.</p>
