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发明名称
METHOD AND APPARATUS FOR IN-SITU PROBE TIP REPLACEMENT INSIDE A CHARGED PARTICLE BEAM MICROSCOPE
摘要
申请公布号
EP1782435(A4)
申请公布日期
2010.06.16
申请号
EP20050773762
申请日期
2005.07.21
申请人
OMNIPROBE, INC.
发明人
MOORE, THOMAS M.;ZAYKOVA-FELDMAN, LYUDMILA
分类号
G21K7/00
主分类号
G21K7/00
代理机构
代理人
主权项
地址
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