| 摘要 |
An insert apparatus for a substrate coating system, the insert apparatus including: an insert element 100 for being operated within a coating system, the insert element including a processing bench, said processing bench being adapted for receiving a coating tool for applying a coating to a substrate, a carrier 110 for carrying the insert element 100, a first positioner 130 collaborating with the carrier 110 for inserting said insert element 100 into a processing chamber 150 of the coating system and/or retracting said insert element 100 from said processing chamber 150, and a second positioner 140 for fine positioning of said insert element 100 within said processing chamber 150.
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