发明名称 Light or radiation detector manufacturing method
摘要 In a light or radiation detector manufacturing method and a light or radiation detector of this invention, when forming a semiconductor, the semiconductor is formed in a predetermined thickness on a dummy substrate by vapor deposition, subsequently the dummy substrate is replaced with a graphite substrate which is a supporting substrate, and the semiconductor continues to be formed on the graphite substrate by vapor deposition. The time when forming the semiconductor in the predetermined thickness on the dummy substrate by vapor deposition is an initial state, and a defective film inevitably to be formed is formed on the dummy substrate. Subsequently, a semiconductor not in the initial state is formed on the graphite substrate put as replacement. This realizes a detector having the semiconductor of higher quality than in the prior art. The semiconductor manufactured in this way is formed continuously at least in a direction of thickness.
申请公布号 US7736941(B2) 申请公布日期 2010.06.15
申请号 US20070441312 申请日期 2007.04.12
申请人 SHIMADZU CORPORATION;INSTITUTE OF NATIONAL COLLEGES OF TECHNOLOGY, JAPAN 发明人 TOKUDA SATOSHI;OKAMOTO TAMOTSU
分类号 H01L21/20 主分类号 H01L21/20
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