发明名称 Support for acoustic resonator and corresponding integrated circuit
摘要 An integrated circuit includes at least one interconnection level and an acoustic resonator provided with an active element and a support. The includes at least one bilayer assembly having a layer of high acoustic impedance material and a layer of low acoustic impedance material. The support further includes a protruding element arranged on a metallization level of the interconnection level, making it possible to produce an electrical contact between an interconnection level and the active element of the acoustic resonator.
申请公布号 US7737804(B2) 申请公布日期 2010.06.15
申请号 US20060511082 申请日期 2006.08.28
申请人 STMICROELECTRONICS S.A.;COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BOUCHE GUILLAUME;PARAT GUY
分类号 H03H9/00 主分类号 H03H9/00
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