| 摘要 |
A position control method of inertial drive actuator includes a movement-amount setting step of setting an amount of movement, a target-position setting step of setting a target position of a moving body, a position detection step of detecting a relative position of the moving body, a comparison step of comparing the target position and the relative position, a drive-voltage pattern setting step of setting a drive voltage pattern which is to be applied to the moving means, a first electrode, and a second electrode, based on the amount of movement which is set, and a comparison result, and a driving step of driving the moving body by controlling a frictional force between the vibration substrate and the moving body, by making an electrostatic force act on both, while synchronizing with a movement of the vibration substrate, by applying a drive voltage pattern which is set at the drive-voltage pattern setting step, between the first electrode and the second electrode, and the moving body is moved to the target position by repeating steps from the comparison step to the driving step. |
