发明名称 Brush core assembly
摘要 A brush core for use in cleaning a substrate is provided. The brush core includes an elongated cylinder having a first end and a second end. The first end of the elongated cylinder is configured to receive a drive hub. The second end is configured to receive fluid into an inner cavity of the elongated cylinder. The inner cavity is configured to distribute fluid to a plurality of fluid channels having a first diameter. The plurality of fluid channels are configured to distribute the fluid to corresponding distribution holes having a second diameter. The brush core further including a plurality of non-fluid distributing pockets defined on the outer surface. The corresponding distribution holes and plurality of non-fluid distributing pockets are configured so that a thickness of a solid portion of the brush core is substantially similar. In one embodiment, the first diameter is less than the second diameter.
申请公布号 US7735177(B1) 申请公布日期 2010.06.15
申请号 US20060351567 申请日期 2006.02.10
申请人 LAM RESEARCH CORPORATION 发明人 FARBER JEFFREY J.;PENA CHRISTOPHER;ORBETA EDWARD
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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