| 摘要 |
PURPOSE: A multiple diffraction grating is provide to simplify manufacturing processes by filing the material of a grating line if a gap between one grating line and the other grating line is narrower than a pre-set gap. CONSTITUTION: If a part of one grating line is overlapped with other grating line, the line width or the line height of the overlapped grating lines are simplified based on those of the grating lines. If a gap between one grating line and other grating line is narrower than a pre-set gap, the material of the grating line fills the gap.
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