INSPECTION SYSTEM AND METHOD FOR PROCESSING DETECTION IMAGE IN THE INSPECTION SYSTEM

摘要

<P>PROBLEM TO BE SOLVED: To provide a system for inspecting a semiconductor wafer, which compares acquired images without adding any circuit in consideration of the direction of inspecting the acquired image. Ž<P>SOLUTION: The inspection system includes: a detection part for generating image data by scanning an inspection object with an electronic beam or the rays of light; a memory for inspection, which stores image data; an inspection processing part for performing inspection by reading the image data stored in the memory for inspection; and a control information addition part for adding control information to the image data. The inspection processing part reads the image data based on the added control information. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž