| 摘要 |
FIELD: electricity. ^ SUBSTANCE: field emission element comprises substrate (1), cathode structure (7, 8, 9) made of one or several layers of electroconductive material and support structure (10, 11, 12) arranged on outer surface of mentioned substrate and consisting of one dielectric layer or several dielectric and electroconductive layers arranged on upper surface of specified cathode structure and comprising through holes, inside which emission cathodes are formed in the form of carbon nanotubes (6) located on outer surface of cathode structure perpendicularly to this surface, anode layer (14) from electroconductive material arranged on outer surface of specified support structure and comprising technological holes matched with specified holes in support structure. Creation of anode and formation of cathode (application of carbon nanotubes) are executed in a single technological cycle without additional operation of matching anodes with cathode structure. ^ EFFECT: increased evenness of current and reduced working voltages in emission instruments of vacuum microelectronics on the basis of carbon nanotubes. ^ 4 cl, 12 dwg, 1 ex |
