| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette stage for properly arranging a wafer cassette by a simple configurations. SOLUTION: In a cassette stage 100, when a wafer cassette 200 is not loaded, a right-side cassette guide 120 and a left-side cassette guide 110 turnably and pivotally supported by guide pivoting mechanisms 131 and 132 are put in an open state by a guide opening mechanism 140. When the wafer cassette 200 is loaded from the upper part, a lower right support member 121 and a lower left support member 111 are turned downward by its weight, and a right side pressure-welding member 122 of the right side cassette guide 120 is pressure-welded to the right side face of the wafer cassette 200, and a left side pressure welding member 112 of a left side cassette guide 110 is pressure-welded to the left side face of the wafer cassette 200. Thus, it is possible to symmetrically hold the wafer cassette 200 by the right-side cassette guide 120 and the left-side cassette guide 110. COPYRIGHT: (C)2010,JPO&INPIT |
