DETECTION METHOD OF EPITAXIAL STACKING FAULTS ON EPITAXIAL WAFER

摘要

PURPOSE: A method for detecting the epitaxial stacking faults of an epitaxial wafer is provided to detect the epitaxial stacking faults in real time using a surface scanner with a scattering method. CONSTITUTION: A sample epitaxial wafer is prepared(S100). Faults of the sample epitaxial wafer are detected using a multi beam scanner(S110). The epitaxial stacking faults of an epitaxial wafer is classified by marking the kinds of the faults. The faults are detected using a scattering surface scanner. The detected faults by the multi-beam scanner are matched to the detected faults by the scattering surface scanner.