| 摘要 |
PROBLEM TO BE SOLVED: To provide an ionizer for uniformizing an ion-production quantity by decreasing a difference in an applied voltage irrespective of positions in a plurality of discharging electrodes and for uniformizing an ion-injection quantity by injecting ion together with a purifying gas containing the same degree of injection quantity, injection pressure, and injection rate, and further to provide an ionizer system equipped with a plurality of ionizers. SOLUTION: A looped wiring 13 is included in the electric circuit of the ionizer to uniformize an applied voltage. Further, a channel unit branched from an upper channel portion and connected to a plurality of lower channel portions each with the same number is included in the fluid channel of the ionizer to uniformize the injection quantity, the injection pressure, and the injection rate. COPYRIGHT: (C)2010,JPO&INPIT |
