| 摘要 |
<p>The invention relates to a precipitation equipment for manufacturing a thin film type solar battery, which can prevent the pollution brought by the particles so as to decrease the mainantenance cost by preventing the performance reduction of the solar battery. The equipment comprises: a chamber with an inlet and an outlet for the sediment; a gas supply section supplying gas to the chamber; a heating member arranged in the chamber; a guide rail arranged in the chamber; a sediment fixing disc sliding along the guide rail; a transmission section for transporting the sediment fixing disc.</p> |
