| 摘要 |
PURPOSE: A load port is provided to improve work efficiency by drawing out a wafer between within an FOUP and within a semiconductor manufacturing apparatus. CONSTITUTION: A purge stage(2) includes a purge ports(23,24) capable of replacing a gas environment inside of an FOUP into a nitrogen or a dry air. An opener stage(3) is installed on the purge stage side by side. The opener stage includes a door unit with opening-closing an opening unit and the opening unit. A transfer apparatus transfers FOUP between the purge stage and the opener stage. A sub purge unit inspires the nitrogen or the dry air in the FOUP.
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