| 摘要 |
PROBLEM TO BE SOLVED: To provide a precision substrate container capable of efficiently draining and drying cleaning water entering a fitting groove to which a gasket is inserted, and of preventing the contamination caused by the residual cleaning water. SOLUTION: The precision substrate storing container is provided with a container body having an opening in the one end, a cover for closing the opening and a gasket forming a seal being held between the container body and the cover. On the container body or the cover, the fitting groove is formed to which the gasket is inserted. The gasket includes a base with an endless shape and a seal part extended from the base. On the base, a fitting part to be inserted to the fitting groove is formed, and a connecting groove is formed in either the fitting part or the fitting groove. COPYRIGHT: (C)2010,JPO&INPIT |
