ROTATING ARM FOR WRITING OR READING AN IMAGE ON A WORKPIECE

摘要

The technology disclosed relates to scanning of large fiat substrates for reading and writing images. Examples are flat panel displays, PCB's and photovoltaic panels. Reading and writing is to be understood in a broad sense: reading may mean microscopy, inspection, metrology, spectroscopy, interferometry, scatterometry, etc. of a large workpiece, and writing may mean exposing a photoresist, annealing by optical heating, ablating, or creating any other change to the surface by an optical beam. In particular, we disclose a technology that uses a rotating or swinging arm (1140A, 1140B, 1140C) that describes an arc across a workpiece (1111,1112) as it scans, instead of following a traditional straight-line motion.