INDIUM OXIDE TARGET

摘要

Disclosed is an indium oxide target comprising an oxide sintered body which contains yttrium in addition to indium oxide and tin. This indium oxide target is characterized in that the contents of tin and yttrium are within such a range that the molar ratio y of tin relative to 1 mole of indium is not less than (-2.5 x 10Ln(x)-5.8 x 10) but not more than (-1.0 x 10Ln(x)-5.0 x 10), which values are expressed by using the molar ratio x of yttrium relative to 1 mole of indium.