| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of controlling the focal length with high accuracy. <P>SOLUTION: A laser beam marking apparatus 1 includes: a beam expander 22 having a magnifying lens 32 and a converging lens 33; a linear motor 34 for moving the converging lens 33 with the direction of the optical axis of the laser beam L as the moving direction; a console 6 capable of setting the target focal length of the laser beam L; and a control device 61 for controlling the linear motor 34. When the target focal length of the laser beam L is changed, the control device 61 calculates the target movement of the converging lens 33 in which the focal length of the laser beam L is the target focal length, and corrects the target movement based on the angleθof inclination detected by an angle sensor 51. The control device 61 moves the converging lens 33 by driving the linear motor 34 so that the movement of the converging lens 33 is the target movement after the correction. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
