发明名称 METHOD FOR FILLING METAL INTO FINE SPACE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method capable of filling a fine space with a hardened metal without causing a gap or void; to provide a method capable of preventing unevenness of the hardened metal cooled in the fine space; and to provide a method capable of contributing to simplification of processes and improvement of yield. <P>SOLUTION: The method for filling a molten metal 4 into a fine space 21 present in an object 2 to be processed and hardening the metal includes: the steps of filling the molten metal 4 from an opening surface opened on the fine space 21 into the inside, and cooling the molten metal 41 filled in the fine space 21 in a state that a forcible external force F1 exceeding atmospheric pressure is applied and hardening the molten metal. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010129662(A) 申请公布日期 2010.06.10
申请号 JP20080300887 申请日期 2008.11.26
申请人 NAPURA:KK 发明人 SEKINE SHIGENOBU;SEKINE YURINA;KIMURA RYUJI
分类号 H01L21/288 主分类号 H01L21/288
代理机构 代理人
主权项
地址