| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of forming a thin film and a method of manufacturing an organic EL device forming the thin film of a desired thickness by a liquid drop discharging method with no reduction of its function as the thin film. Ž<P>SOLUTION: The method of forming the thin film includes the steps of applying a first liquefied element 71a containing a solid matter and a solvent onto a substrate by the liquid drop discharging method to form a first liquefied film 71, drying the first liquefied film 71 in an pressure atmosphere higher than a saturated vapor pressure of the solvent in the first liquefied element 71a to form a first dry film 72, applying a second liquefied element 73a containing a solid matter and a solvent onto the first dry film 72 by the liquid drop discharging method to form a second liquefied film 73, and drying the second liquefied film 73 and the first dry film 72 in an pressure atmosphere lower than a saturated vapor pressure of the solvent in the second liquefied element 73a to form the thin film 70R (70G, 70B) constituted of the second liquefied film 73 and the first dry film 72. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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