| 摘要 |
FIELD: chemistry. ^ SUBSTANCE: invention relates to methods of making pipes, bars for using optical fibre and workpieces for UV transmitting optical components from silicon dioxide through plasma sputtering. The plasma burner has an outer pipe made from quartz glass, a surrounded inductance coil, an inner pipe made from quartz glass, a middle pipe made from quartz glass, at least one nozzle for inlet of chemical reagents placed between first and second annular discs. One end of the pipes is joined to the base. The second end of the outer pipe is joined to the first annular disc made from quartz glass, the second end of the middle pipe is joined to the second annular disc made from quartz glass and the second end of the inner pipe is directed towards the substrate. ^ EFFECT: reduced contamination of products. ^ 40 cl, 7 dwg |
