| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dry vacuum pump unit which has a compact and lightweight structure allowing the movement to a required place manually and which can efficiently dissipate heat from electrical components, pump modules or the like to be cooled. Ž<P>SOLUTION: A dry vacuum pump unit including a booster pump module 4 arranged on a vacuum side and a main pump module 5 arranged on an outside air pressure side, includes a heat dissipation plate 2 equipped with heat dissipation fins 11, mounts electrical components 3 on the heat dissipation plate 2, and installs the booster pump module 4 and main pump module 5 by interposing a pump module mounting base 14 constituted of materials excellent in heat conductivity on the heat dissipation plate 2 or the pump module on the heat dissipation plate 2 directly. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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