| 摘要 |
PROBLEM TO BE SOLVED: To provide a component extraction system which can carry out a cleaning cycle of a plurality of cleaning containers for a short time utilizing a boost pump, and can repeat the cleaning cycle efficiently within a predetermined time. SOLUTION: In the component extraction system 10A, a controller 19 performs a first boost means of pressurizing a fluid flowing in a first cleaning container 15 to a predetermined pressure utilizing the boost pump 13, a first extracting means of extracting impurities from a filter utilizing the fluid while releasing the load of the boost pump 13 to the first cleaning container 15, a first depressurizing means of depressurizing the fluid flowing in the first cleaning container 15 to an atmospheric pressure, a second boost means of pressurizing the fluid flowing in a second cleaning container 16 to a predetermined pressure utilizing the boost pump 13 at the time of performing the fist extracting means, a second extracting means of extracting impurities from a filter utilizing the fluid while releasing the load of the boost pump 13 to the second cleaning container 16, and a second depressurizing means of depressurizing the fluid flowing in the second cleaning container 16 to the atmospheric pressure. COPYRIGHT: (C)2010,JPO&INPIT
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