发明名称 SENSOR, SENSOR TEMPERATURE CONTROL METHOD AND ABNORMALITY RECOVERY METHOD
摘要 A heater pattern is arranged on at least one substrate among substrates configuring a package, and a temperature in the package is controlled by controlling a quantity of electricity carried to the heater pattern corresponding to the ambient temperature of a sensor chip in the package.
申请公布号 US2010139389(A1) 申请公布日期 2010.06.10
申请号 US20080529017 申请日期 2008.02.15
申请人 YAMATAKE CORPORATION 发明人 MORITA YASUJI;HATAKEYAMA HIROSHI;AOSHIMA SHIGERU;MORIO SHUJI;WARASHINA ISAMU
分类号 G01F1/688;H01L29/66 主分类号 G01F1/688
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