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发明名称
PRODUCTION PROCESS OF PERIODIC TABLE GROUP 13 METAL NITRIDE CRYSTAL AND PRODUCTION METHOD OF SEMICONDUCTOR DEVICE USING THE SAME
摘要
申请公布号
KR100961416(B1)
申请公布日期
2010.06.09
申请号
KR20077002251
申请日期
2005.07.04
申请人
发明人
分类号
C30B29/38
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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