| 摘要 |
PROBLEM TO BE SOLVED: To provide a FOUP opener which maintains positive pressure in the second controlling space, excludes the external atmosphere from the periphery of a FOUP door, prevents the external atmosphere from flowing into the FOUP when the FOUP door is open, and has high reliability to prevent a damage on a wafer. SOLUTION: The FOUP opener 1 comprises: a dock plate 31 for placing and positioning the FOUP 10; a dock moving mechanism 30 for moving the dock plate 31 close to the location where the FOUP door 13 is mounted or removed; a port door 23 having a mounting and removing mechanism and a holding mechanism for the FOUP door 13; a port door moving mechanism 40 for moving the port door 23 in the horizontal direction; and a port plate 21 having an opening 22 closed by the port door 23. The FOUP opener is also provided with a following and moving means allowing the FOUP door 13 to hit the engaged face of the port door 23 and following the hit FOUP door 13 and the port door 23 and moving them to a predetermined location. |
