发明名称 Method and device for electrostatic fixing of substrates with polarized molecules
摘要 Method for handling a substrate with polarizable molecules including providing a carrier with a first junction electrode and disposing the substrate between the first junction electrode and a second junction electrode. Fixing the substrate on the carrier is achieved by applying a voltage between the first junction electrode and the second junction electrode, so that the polarizable molecules are polarized. After removing the second junction electrode, the substrate remains fixed on the carrier.
申请公布号 US7733624(B2) 申请公布日期 2010.06.08
申请号 US20070089972 申请日期 2007.03.22
申请人 FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. 发明人 LANDESBERGER CHRISTOF
分类号 H01T0023/000012 主分类号 H01T0023/000012
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