Piezoelectric actuator with terminals on common plane, ink-jet head provided with the same, ink-jet printer, and method for manufacturing piezoelectric actuator

摘要

A piezoelectric actuator includes a metallic vibration plate, an insulating layer, a plurality of individual electrodes, a piezoelectric layer and a common electrode. The insulating layer is formed on the top surface of the vibration plate. The individual electrodes are formed on the top surface of the insulating layer. The piezoelectric layer is formed on the top surfaces of the individual electrodes. The common electrode is formed on the top surface of the piezoelectric layer over the individual electrodes. A plurality of terminals and a plurality of wirings are formed on the top surface of the insulating layer. Each of the terminals is associated with one of the individual electrodes. Each of the wirings connects one of the individual electrodes and the associated terminal.