CHEMICAL SOLUTION PRE-DISCHARGING APPARATUS

摘要

PURPOSE: A chemical solution pre-discharge apparatus is provided to simply operate a pre-discharge process of a chemical solution, and to prevent an abnormal coating of the chemical solution including stripes, wage patterns, and disconnections of the solution. CONSTITUTION: A chemical solution pre-discharge apparatus comprises the following: a priming plate(2) supplying a flat surface(F) to be pre-discharged with a residual chemical solution from a slit nozzle(C1); a cleaning unit(4) cleaning the surface of the priming plate; and a transport unit(6) changing the location of the cleaning unit and the priming plate. The priming plate is extended to the one direction of the apparatus to correspond with the slit nozzle with one side. The other side of the priming plate is fixed to a supporting stand for the plate.